A mainstream semiconductor equipment manufacturer in China uses 99% high-purity alumina ceramic rods as the core precision support components of the equipment cavity, replacing the original stainless steel support structure, achieving a dual upgrade of equipment performance and operation efficiency.
Customized high-precision alumina ceramic rod, with a smooth and flat surface, combining the core characteristics of high rigidity, low thermal expansion coefficient, plasma corrosion resistance, high insulation, and low dust precipitation, perfectly matching the harsh working conditions of clean, high-precision, and continuous operation of etching equipment. This ceramic rod is mainly used to fix the optical detection components and wafer limit structures inside the equipment, and plays a core role in precise support, positioning calibration, isolation and protection, ensuring the structural stability of the equipment during high-speed reciprocating operation.
